Influence of the deposition conditions on the morphology of PVDF layers with possible application in MEMS pressure sensors

Piezoelectric films of poly(vinylidene fluoride) (PVDF) were prepared by casting and spin coating on silicon and glass substrates. The effect of the drying temperature and the post-annealing temperature on the film morphology was studied with optical microscopy. It was chosen the optimal combination of deposition conditions, regarding the wetting of the substrate surfaces, uniformity of the produced layers and their adhesion. Planar types of structures, producing surface acoustic waves (SAW) were prepared to establish piezoelectric response after the high temperature treatment of the polymer layers.